ISSN 2394-5125
 

Research Article 


Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj*, Anupma Marwaha, Sanjay Marwaha.

Abstract
This article describes electrostatic and electromechanical analysis for capacitive shunt RF switch operating in the frequency range of 10-50 GHz. Two different conducting materials (Aluminum and Gold) have been used in this studied. This work focuses on the quantitative parameters, e.g., electric charge, field, pull-in voltage, electrostatic force and spring constant for different geometrical configuration of the switch. MATLAB, HFSS and COVENTOR software’s have been used for the analytical and full wave analysis of 3D structure, respectively. The electrostatics, electromagnetic and electromechanical results are well in good agreements with the analytical results.

Key words: CPW, critical stress, full-wave analysis, FEM, hysteresis, quasi-static analysis, residual stress, shunt switch


 
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How to Cite this Article
Pubmed Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. JCR. 2020; 7(5): 1576-1583. doi:10.31838/jcr.07.05.271


Web Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. http://www.jcreview.com/?mno=97340 [Access: August 18, 2021]. doi:10.31838/jcr.07.05.271


AMA (American Medical Association) Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. JCR. 2020; 7(5): 1576-1583. doi:10.31838/jcr.07.05.271



Vancouver/ICMJE Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. JCR. (2020), [cited August 18, 2021]; 7(5): 1576-1583. doi:10.31838/jcr.07.05.271



Harvard Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha (2020) Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. JCR, 7 (5), 1576-1583. doi:10.31838/jcr.07.05.271



Turabian Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. 2020. Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. Journal of Critical Reviews, 7 (5), 1576-1583. doi:10.31838/jcr.07.05.271



Chicago Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. "Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch." Journal of Critical Reviews 7 (2020), 1576-1583. doi:10.31838/jcr.07.05.271



MLA (The Modern Language Association) Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha. "Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch." Journal of Critical Reviews 7.5 (2020), 1576-1583. Print. doi:10.31838/jcr.07.05.271



APA (American Psychological Association) Style

Kuldeep Sharma, Pradeep Kumar Gaur, Abhishek Sharma, Tarun Singla, Pushparaj, Anupma Marwaha, Sanjay Marwaha (2020) Detailed Electrostatic and Electromechanical Analysis of MEMS Shunt Switch. Journal of Critical Reviews, 7 (5), 1576-1583. doi:10.31838/jcr.07.05.271